
Zelenograd Nanotechnology Center (ZNTC) and Planar have concluded developing Russia's first lithography system capable of supporting 350nm-class process technologies (0.35 micron). The development was assisted by Belarus-based Planar company. The machine has cleared official inspections and is undergoing integration trials in Zelenograd. Despite its symbolic significance, the system's design has been outdated by several decades, and whether ZNTC can produce these in volume is unclear.